Apr 2019

Two towers as a clean room guarantee – MKFV0415, the extraction system for the laser separation system

The clean room: in a controlled environment, optimal air conditions ensure perfect production results. If wafers are cut in chip production clean rooms using lasers, the dust created must simultaneously be removed by suction safely and completely.

A case for Fuchs Umwelttechnik.

The initial situation at the customer's facility is double-cell production in two independent stations. Complete removal by suction must be done for the cutting processes inside these stations. For this direct dust extraction, the Fuchs Umwelttechnik engineers designed the two MKFV0415 high-pressure extraction and filtering devices, each with side channel blowers in a reinforced design. Any larger silicon particles that accumulate automatically enter pre-separation via stainless steel cyclones.

In addition, a third extraction and filtering device of type IF1300.1 fully cleans the room air.

The three extraction and filtering devices fit into the grey room thanks to their space-saving modular design. The contamination-free removal of the extracted emissions is possible if necessary.

As a digital security feature, each system is connected to a PLC with a Profibus and is monitored around the clock, since all devices can be easily used in three-shift operation.
Two MKFV0415 and one IF1300.1 – another sophisticated total solution from Fuchs Umwelttechnik.